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MEMS Tunable Hybrid Plasmonic-Si Waveguide

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Abstract

A MEMS tunable hybrid plasmonic-Si (HP) waveguide is investigated, showing very large changes of both effective refractive index and propagation loss when applying bias voltage. Preliminary experimental results show that: with 15μm MEMS structure in Si waveguide platform, the extinction ratio can be over 20dB between “on” and “off” states.

© 2017 Optical Society of America

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