Abstract
Diffraction gratings used in extreme UV are typically coated with periodic multilayer thin films. These coatings have a small bandwidth, thus leading to a narrow usable spectral region of multilayer gratings. Well-designed aperiodic multilayer coatings could provide high reflectivity over a much broader wavelength region, so they could broaden the usable spectral region of multilayer gratings. We designed and deposited an aperiodic multilayer coating onto a blazed grating substrate. At an incidence angle of 10°, the –2nd-order diffraction efficiency of the multilayer grating is through the wavelength range of .
© 2009 Optical Society of America
Full Article | PDF ArticleMore Like This
Hui Lin, Lichao Zhang, Lifeng Li, Chunshui Jin, Hongjun Zhou, and Tonglin Huo
Opt. Lett. 33(5) 485-487 (2008)
C. Montcalm, S. Bajt, and J. F. Seely
Opt. Lett. 26(3) 125-127 (2001)
J. F. Seely, M. P. Kowalski, W. R. Hunter, J. C. Rife, T. W. Barbee, G. E. Holland, C. N. Boyer, and C. M. Brown
Appl. Opt. 32(25) 4890-4897 (1993)