Abstract
We propose and demonstrate broadband focusing grating couplers for suspended-membrane waveguides on silicon-on-insulator both in near-infrared (near-IR) and in mid-IR wavelength range. Finite-difference time-domain simulation predicts 3 dB bandwidth with coupling efficiency for an apodized grating in near-IR. maximum coupling efficiency and 3 dB bandwidth are realized experimentally. In mid-IR, maximum coupling efficiency from a uniform focusing grating is measured at 2.75 μm, and 3 dB bandwidth is predicted theoretically.
© 2012 Optical Society of America
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