Abstract
This Letter reports a novel method for the simple fabrication of microlens arrays with a controlled shape and diameter on glass substrates. Multilayer stacks of silicon dioxide deposited by oblique angle deposition with hole mask patterns enable microlens formation. Precise control of mask height and distance, as well as oblique angle steps between deposited layers, supports the controllability of microlens geometry. The fabricated microlens arrays with designed geometry exhibit uniform optical properties.
© 2016 Optical Society of America
Full Article | PDF ArticleMore Like This
Zhihao Chen, Hongbing Yuan, Peichao Wu, Wenwu Zhang, Saulius Juodkazis, Haibo Huang, and Xiaowen Cao
Opt. Lett. 47(1) 22-25 (2022)
Guangqing Du, Qing Yang, Feng Chen, Hewei Liu, Zefang Deng, Hao Bian, Shengguan He, Jinhai Si, Xiangwei Meng, and Xun Hou
Opt. Lett. 37(21) 4404-4406 (2012)
Zefang Deng, Qing Yang, Feng Chen, Xiangwei Meng, Hao Bian, Jiale Yong, Chao Shan, and Xun Hou
Opt. Lett. 40(9) 1928-1931 (2015)