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Conferences > pcAOP > 2023 > JTh1A > JTh1A.1

Microscopic optical surface profiling at 67Hz

Narcís Vilar, Roger Artigas, Martí Duocastella, and Guillem Carles

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Abstract

We present a technique for rapid microscopic optical surface profiling with large axial ranges. Measurements are reconstructed from a few images, with synchronized modulated-illumination and focal-sweeping during exposure. We demonstrate three-dimensional measurements at 67/s.

© 2023 The Author(s)

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