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Comparison of surface and bulk scattering in optical multilayers

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Abstract

Electromagnetic theories provide a tool to detect the origin of scattering in optical multilayers. Illumination and observation conditions that cause surface and bulk scatterings to have different behaviors are pointed out. Angular, wavelength, and polarization dependences are investigated for the location of structural irregularities at interfaces or in the bulk of a multilayer. Specific experiments can be designed.

© 1993 Optical Society of America

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