Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection

Not Accessible

Your library or personal account may give you access

Abstract

We propose the use of binary slanted surface-relief gratings with parallel-groove walls as input and output couplers in a planar optical interconnect. Parametric optimization of cascaded output couplers is employed to design an interconnect consisting of N output couplers producing a uniform intensity distribution with a high efficiency that may be realized in one lithographic etching step. The sensitivity of a N = 4 interconnect to various fabrication errors is analyzed. We demonstrate the operation of a slanted surface-relief grating manufactured with electron-beam lithography and reactive-ion etching for an operating wavelength of λ = 0.633 μm.

© 1997 Optical Society of America

Full Article  |  PDF Article
More Like This
Binary surface-relief gratings for array illumination in digital optics

Antti Vasara, Mohammad R. Taghizadeh, Jari Turunen, Jan Westerholm, Eero Noponen, Hiroyuki Ichikawa, J. Michael Miller, Tommi Jaakkola, and Sirpa Kuisma
Appl. Opt. 31(17) 3320-3336 (1992)

Optimum parallel-face slanted surface-relief gratings

Jonathan S. Maikisch and Thomas K. Gaylord
Appl. Opt. 46(18) 3674-3681 (2007)

Optimization of nonbinary slanted surface-relief gratings as high-efficiency broadband couplers for light guides

Benfeng Bai, Janne Laukkanen, Markku Kuittinen, and Samuli Siitonen
Appl. Opt. 49(28) 5454-5464 (2010)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (12)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved