Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Integrated optical micromachined pressure sensor with spectrally encoded output and temperature compensation

Not Accessible

Your library or personal account may give you access

Abstract

A promising type of optical pressure sensor combines an integrated optical interferometer with a micromachined diaphragm on a shared silicon substrate. We have demonstrated a sensor of this type that uses an unbalanced Mach–Zehnder waveguide interferometer together with a broadband source to produce a spectrally encoded measurement. This spectral encoding mechanism is advantageous as it is not readily degraded by transmission through optical fibers. We have also demonstrated a means to obtain a temperature-compensated pressure measurement by interrogating both polarization eigenmodes of the interferometer.

© 1998 Optical Society of America

Full Article  |  PDF Article
More Like This
Integrated optic pressure sensor on silicon substrate

Masashi Ohkawa, Masayuki Izutsu, and Tadasi Sueta
Appl. Opt. 28(23) 5153-5157 (1989)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved