Abstract

A two-wavelength interferometer that uses two separate modulating currents with different phases but the same frequencies to detect a greater degree of object displacement in real time is proposed and demonstrated. The measurement error was 57 nm, roughly 1/80 of the synthetic wavelength. We have confirmed that this modulating technique enables us to equip our prototype interferometer with a simple feedback-control system that eliminates external disturbance.

© 2000 Optical Society of America

Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation

Takamasa Suzuki, Takayuki Yazawa, and Osami Sasaki
Appl. Opt. 41(10) 1972-1976 (2002)

Two-wavelength sinusoidal phase/modulating laser-diode interferometer insensitive to external disturbances

Osami Sasaki, Hiroyuki Sasazaki, and Takamasa Suzuki
Appl. Opt. 30(28) 4040-4045 (1991)

Wavelength-multiplexed phase-locked laser diode interferometer using a phase-shifting technique

Takamasa Suzuki, Takaya Muto, Osami Sasaki, and Takeo Maruyama
Appl. Opt. 36(25) 6196-6201 (1997)

Sinusoidal phase-modulating laser diode interferometer for wide range displacement measurement

Ming Zhang, Chang Ni, Yu Zhu, Chuxiong Hu, Jinchun Hu, Leijie Wang, and Siqi Ding
Appl. Opt. 56(20) 5685-5691 (2017)

Disturbance-free distributed Bragg reflector laser-diode interferometer with a double sinusoidal phase-modulating technique for measurement of absolute distance

Takamasa Suzuki, Takao Ohizumi, Tatsuhiko Sekimoto, and Osami Sasaki
Appl. Opt. 43(23) 4482-4487 (2004)