Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Signal modeling for low-coherence height-scanning interference microscopy

Not Accessible

Your library or personal account may give you access

Abstract

We propose a computationally efficient theoretical model for low-coherence interferometric profilers that measure surface heights by scanning the optical path difference of the interferometer. The model incorporates both geometric and spectral effects by means of an incoherent superposition of ray bundles through the interferometer spanning a range of wavelengths, incident angles, and pupil plane coordinates. This superposition sum is efficiently performed in the frequency domain, followed by a Fourier transform to generate the desired simulated interference signal. Example applications include white-light interferometry, high-numerical-aperture microscopy with a near-monochromatic light source, and interference microscopy for thickness and topography analysis of thin-film structures and other complex surface features.

© 2004 Optical Society of America

Full Article  |  PDF Article
More Like This
Signal modeling in low coherence interference microscopy on example of rectangular grating

Weichang Xie, Peter Lehmann, Jan Niehues, and Stanislav Tereschenko
Opt. Express 24(13) 14283-14300 (2016)

Image formation in low-coherence and confocal interference microscopes

Colin J. R. Sheppard, Maitreyee Roy, and Manjula D. Sharma
Appl. Opt. 43(7) 1493-1502 (2004)

Fourier optics modeling of interference microscopes

Peter J. de Groot and Xavier Colonna de Lega
J. Opt. Soc. Am. A 37(9) B1-B10 (2020)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (12)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (46)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved