Effects of phase change on reflection in phase-measuring interference microscopy

Arnaud Dubois

doi:10.1364/AO.43.001503

Applied Optics
Vol. 43,
Issue 7,
pp. 1503-1507
(2004)
•https://doi.org/10.1364/AO.43.001503

Effects of phase change on reflection in phase-measuring interference microscopy

Arnaud Dubois

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Arnaud Dubois, "Effects of phase change on reflection in phase-measuring interference microscopy," Appl. Opt. 43, 1503-1507 (2004)

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Related Topics
Optics & Photonics Topics
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The topics in this list come from the Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Height measurements (120.2830)
- Interferometry (120.3180)
- Phase measurement (120.5050)
- Surface measurements, figure (120.6650)
- Interference microscopy (180.3170)

About this Article
History
- Original Manuscript: August 14, 2003
- Revised Manuscript: November 11, 2003
- Published: March 1, 2004

Abstract

We show by analytical and numerical calculations that the phase change on reflection that occurs in interference microscopy is almost independent of the numerical aperture of the objective. The shift of the microscope interferogram response due to the phase change on reflection, however, increases with the numerical aperture. Measurements of the interferogram shift are made with a Linnik interference microscope equipped with various numerical-aperture objectives and are reported and compared with theory.

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Equations (23)

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	NA
	0	0.1	0.2	0.3	0.4	0.5	0.6	0.7	0.8	0.9
Shift (nm)b	27.7	27.8	28.0	28.4	28.9	29.7	30.7	32.1	34.1	36.7
Shift (nm)c	27.7	27.8	28.0	28.4	28.9	29.6	30.6	31.7	33.3	35.2
Shift (nm)d	27.7	27.8	28.0	28.4	28.9	29.7	30.8	32.3	34.5	37.8
Shift (nm)e	27.7	27.8	28.0	28.4	28.9	29.8	30.9	32.6	35.3	40.4

	NA
	0.1*	0.25*	0.4	0.5	0.7	0.9
Shifta	27.5	28.5	28.8	29.6	32.7	34.9
Shiftb	27.8	28.2	28.9	29.7	32.1	36.7

	NA
	0	0.1	0.2	0.3	0.4	0.5	0.6	0.7	0.8	0.9
Shift (nm)b	27.7	27.8	28.0	28.4	28.9	29.7	30.7	32.1	34.1	36.7
Shift (nm)c	27.7	27.8	28.0	28.4	28.9	29.6	30.6	31.7	33.3	35.2
Shift (nm)d	27.7	27.8	28.0	28.4	28.9	29.7	30.8	32.3	34.5	37.8
Shift (nm)e	27.7	27.8	28.0	28.4	28.9	29.8	30.9	32.6	35.3	40.4

	NA
	0.1*	0.25*	0.4	0.5	0.7	0.9
Shifta	27.5	28.5	28.8	29.6	32.7	34.9
Shiftb	27.8	28.2	28.9	29.7	32.1	36.7

Abstract

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Figures (3)

Tables (2)

Equations (23)

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