We present a study in which we enhance the carrier-to-noise ratio of a superresolution near-field structure (super-RENS) disk to read below 100–nm marks by implementing a mask layer comprising a Au nanocluster-embedded dielectric film. Various Au nanocluster-embedded mask layers are fabricated by a radio-frequency cosputtering process, and the size and distribution of Au nanoclusters are controlled. To verify the enhancement of the various films for super-RENS disk applications, the sensitivity enhancement of plasmonic gas sensing is demonstrated.
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