Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis

Sven Schröder; Tobias Herffurth; Marcus Trost; Angela Duparré

doi:10.1364/AO.49.001503

Applied Optics
Vol. 49,
Issue 9,
pp. 1503-1512
(2010)
•https://doi.org/10.1364/AO.49.001503

Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis

Sven Schröder, Tobias Herffurth, Marcus Trost, and Angela Duparré

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Sven Schröder, Tobias Herffurth, Marcus Trost, and Angela Duparré, "Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis," Appl. Opt. 49, 1503-1512 (2010)

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Related Topics
Table of Contents Category
- Thin Films
Optics & Photonics Topics
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The topics in this list come from the Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Reflection (120.5700)
- Scattering measurements (120.5820)
- Surface measurements, roughness (120.6660)
- Thin films (310.0310)
- X-rays, soft x-rays, extreme ultraviolet (EUV) (340.7480)

About this Article
History
- Original Manuscript: October 30, 2009
- Revised Manuscript: February 18, 2010
- Manuscript Accepted: February 18, 2010
- Published: March 10, 2010

Abstract

Roughness-induced light scattering critically affects the performance of optical components, in particular at short wavelengths. We present a stand-alone instrument for angle-resolved scattering and reflectance measurements at $13.5 nm$ in the extreme-ultraviolet (EUV) spectral range. The achieved dynamic range allows even the scattering of high-quality EUV mirrors on extremely smooth substrates to be investigated. For Mo/Si multilayers, total scatter losses of several percent have been observed, depending on the substrate qualities as well as on roughening and smoothing effects during coating. Different approximate models for estimating the impact of roughness on scatter losses are discussed and compared with experimental results.

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Contributor	ARS	R, T
$V_{s}$ , $V_{ref}$	1%	1%
$C_{amp}$	1%	-
$C_{cal}$	5%	0.15%
Total	6%	2% (0.3%)^a

	Sample 1	Sample 2	Sample 3
MSFR (nm)	0.15^a (0.15)^b	0.17 (0.16)	0.09 (0.11)
HSFR (nm)	0.30 (0.34)	0.25 (0.23)	0.21 (0.13)
${TS}_{b}$ (%)	$3.9 \pm 1.0$	$2.3 \pm 0.5$	$0.8 \pm 0.3$
R (%)	$65.0 \pm 0.3$	$66.5 \pm 1.0$	$68.3 \pm 0.2$
$R + {TS}_{b}$ (%)	$69.0 \pm 1.0$	$68.8 \pm 0.7$	$69.1 \pm 0.4$

Contributor	ARS	R, T
$V_{s}$ , $V_{ref}$	1%	1%
$C_{amp}$	1%	-
$C_{cal}$	5%	0.15%
Total	6%	2% (0.3%)^a

	Sample 1	Sample 2	Sample 3
MSFR (nm)	0.15^a (0.15)^b	0.17 (0.16)	0.09 (0.11)
HSFR (nm)	0.30 (0.34)	0.25 (0.23)	0.21 (0.13)
${TS}_{b}$ (%)	$3.9 \pm 1.0$	$2.3 \pm 0.5$	$0.8 \pm 0.3$
R (%)	$65.0 \pm 0.3$	$66.5 \pm 1.0$	$68.3 \pm 0.2$
$R + {TS}_{b}$ (%)	$69.0 \pm 1.0$	$68.8 \pm 0.7$	$69.1 \pm 0.4$

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