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Constant-psi constant-delta contour maps: applications to ellipsometry and to reflection-type optical devices

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Abstract

Constant-psi constant-delta contour maps in the reduced angle-of-incidence–film-thickness plane that are useful in ellipsometry and in design of reflection-type optical devices are discussed. As a specific example, a contour map is given for the SiO2–Si film–substrate system at the 6328-Å He–Ne laser wavelength.

© 1982 Optical Society of America

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