Multiple determination of the optical constants of thin-film coating materials
D. P. Arndt, R. M. A. Azzam, J. M. Bennett, J. P. Borgogno, C. K. Carniglia, W. E. Case, J. A. Dobrowolski, U. J. Gibson, T. Tuttle Hart, F. C. Ho, V. A. Hodgkin, W. P. Klapp, H. A. Macleod, E. Pelletier, M. K. Purvis, D. M. Quinn, D. H. Strome, R. Swenson, P. A. Temple, and T. F. Thonn
D. P. Arndt,1
R. M. A. Azzam,2
J. M. Bennett,1
J. P. Borgogno,3
C. K. Carniglia,4
W. E. Case,5
J. A. Dobrowolski,6
U. J. Gibson,7
T. Tuttle Hart,4
F. C. Ho,6
V. A. Hodgkin,1
W. P. Klapp,4
H. A. Macleod,8
E. Pelletier,3
M. K. Purvis,5
D. M. Quinn,4
D. H. Strome,5
R. Swenson,7,8
P. A. Temple,1
and T. F. Thonn2
1U.S. Naval Weapons Center, Physics Division, Michelson Laboratory, China Lake, California 93555. USA
2University of New Orleans, Department of Electrical Engineering, Lakefront, New Orleans, Louisiana 70148. USA
3École Nationale Supérieure de Physique, Centre d’Étude des Couches Minces, Domaine Universitaire de St. Jérôme, 13397 Marseille CEDEX 13, France.
4Optical Coating Laboratory, Inc., 2789 Northpoint Parkway, Santa Rosa, California 95407-7397. USA
D. P. Arndt, R. M. A. Azzam, J. M. Bennett, J. P. Borgogno, C. K. Carniglia, W. E. Case, J. A. Dobrowolski, U. J. Gibson, T. Tuttle Hart, F. C. Ho, V. A. Hodgkin, W. P. Klapp, H. A. Macleod, E. Pelletier, M. K. Purvis, D. M. Quinn, D. H. Strome, R. Swenson, P. A. Temple, and T. F. Thonn, "Multiple determination of the optical constants of thin-film coating materials," Appl. Opt. 23, 3571-3596 (1984)
The seven participating laboratories received films of two different thicknesses of Sc2O3 and Rh. All samples of each material were prepared in a single deposition run. Brief descriptions are given of the various methods used for determination of the optical constants of these coating materials. The measurement data are presented, and the results are compared. The mean of the variances of the Sc2O3 refractive-index determinations in the 0.40–0.75-nm spectral region was 0.03. The corresponding variances for the refractive index and absorption coefficient of Rh were 0.35 and 0.26, respectively.
J. Bartella, P. H. Berning, B. Bovard, C. K. Carniglia, E. Casparis, V. R. Costich, J. A. Dobrowolski, U. J. Gibson, R. Herrmann, F. C. Ho, M. R. Jacobson, R. E. Klinger, J. A. Leavitt, H.-G. Lotz, H. A. Macleod, M. J. Messerly, D. F. Mitchell, W.-D. Muenz, K. W. Nebesny, R. Pfefferkorn, S. G. Saxe, D. Y. Song, P. Swab, R. M. Swenson, W. Thoeni, F. Van Milligen, S. Vincent, and A. Waldorf Appl. Opt. 24(16) 2625-2646 (1985)
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Compromise solution
Value of T increased to make R + T = 1 (see text)
All films were measured on 9/26-27/83 except for the thick Rh film which was measured on 10/7/83.
Table III
R, T and t Method: Measurements of Optical Constants Using Spectrophotometer-type Instruments
No solution for measured T and film thickness; solution at 220 nm thickness is n = 1.89 ± 0.09.
No solution in the 1.8 to 1.9 index range for a homogeneous film.
Table XII
Algebraic Inversion Method: Spectrophotometric Data and Optical Constants for Rh Films
λ (nm)
R
R′
T
t = 12 nm
t = 14 nm
R
R′
T
t = 27.5 nm
n
k
n
k
n
k
400
0.4469
0.2335
0.1540
2.50
3.45
2.20
3.20
0.5465
0.3493
0.0460
2.40
3.00
450
0.4412
0.2252
0.1571
2.75
3.55
2.45
3.30
0.5485
0.3450
0.0520
2.75
3.15
500
0.4317
0.2151
0.1616
3.10
3.55
2.70
3.45
0.5505
0.3371
0.0569
3.00
3.15
550
0.4314
0.2160
0.1633
3.20
3.75
2.85
3.55
0.5551
0.3438
0.0598
3.10
3.30
600
0.4305
0.2148
0.1650
3.30
3.90
2.95
3.70
0.5608
0.3454
0.0621
3.30
3.40
650
0.4303
0.2147
0.1662
3.35
4.15
3.00
3.85
0.5636
0.3494
0.0640
3.35
3.50
700
0.4288
0.2143
0.1673
3.60
4.20
3.10
3.95
0.5658
0.3511
0.0656
3.50
3.60
These results are based on transmittance and reflectance measured from the film side of both samples.
Table XIII
Algebraic Inversion Method: Refractive Index of SiO2
Compromise solution
Value of T increased to make R + T = 1 (see text)
All films were measured on 9/26-27/83 except for the thick Rh film which was measured on 10/7/83.
Table III
R, T and t Method: Measurements of Optical Constants Using Spectrophotometer-type Instruments
No solution for measured T and film thickness; solution at 220 nm thickness is n = 1.89 ± 0.09.
No solution in the 1.8 to 1.9 index range for a homogeneous film.
Table XII
Algebraic Inversion Method: Spectrophotometric Data and Optical Constants for Rh Films
λ (nm)
R
R′
T
t = 12 nm
t = 14 nm
R
R′
T
t = 27.5 nm
n
k
n
k
n
k
400
0.4469
0.2335
0.1540
2.50
3.45
2.20
3.20
0.5465
0.3493
0.0460
2.40
3.00
450
0.4412
0.2252
0.1571
2.75
3.55
2.45
3.30
0.5485
0.3450
0.0520
2.75
3.15
500
0.4317
0.2151
0.1616
3.10
3.55
2.70
3.45
0.5505
0.3371
0.0569
3.00
3.15
550
0.4314
0.2160
0.1633
3.20
3.75
2.85
3.55
0.5551
0.3438
0.0598
3.10
3.30
600
0.4305
0.2148
0.1650
3.30
3.90
2.95
3.70
0.5608
0.3454
0.0621
3.30
3.40
650
0.4303
0.2147
0.1662
3.35
4.15
3.00
3.85
0.5636
0.3494
0.0640
3.35
3.50
700
0.4288
0.2143
0.1673
3.60
4.20
3.10
3.95
0.5658
0.3511
0.0656
3.50
3.60
These results are based on transmittance and reflectance measured from the film side of both samples.
Table XIII
Algebraic Inversion Method: Refractive Index of SiO2
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