Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

TECHNICAL NOTE Applications of the normal-incidence rotating-sample ellipsometer to high- and low-spatial-frequency gratings

Not Accessible

Your library or personal account may give you access

Abstract

The normal-incidence rotating-sample ellipsometer is an instrument that can be used to characterize grating surfaces from the measured ratio ρ of complex reflection coefficients r y/r x of light polarized perpendicular and parallel to the grating groove direction. Experimental results at different wavelengths for different gratings with spatial frequencies from 150 to 5880 grooves/mm are presented. The groove depth of the 5880-grooves/mm gold-coated grating can be estimated from the measured ρ and rigorous grating theory.

© 1996 Optical Society of America

Full Article  |  PDF Article
More Like This
TECHNICAL NOTE Charge-coupled-device detection of soft x rays for grazing-incidence spectrometers

C. H. Skinner and J. L. Schwob
Appl. Opt. 35(22) 4321-4324 (1996)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved