Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Spin-on-glass coatings for the generation of superpolished substrates for use in the extreme-ultraviolet region

Not Accessible

Your library or personal account may give you access

Abstract

Substrates intended for use as extreme-ultraviolet (EUV) optics have extremely stringent requirements in terms of finish. These requirements can dramatically increase the cost and fabrication time, especially when nonconventional shapes, such as toroids, are required. Here we present a spin-on-glass resist process capable of generating superpolished parts from inexpensive substrates. The method has been used to render diamond-turned substrates compatible for use as EUV optics. Toroidal diamond-turned optics with starting rms roughness in the 3.33.7  nm range have been smoothed to the 0.40.6nm range. EUV reflectometry characterization of these optics has demonstrated reflectivities of approximately 65%.

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
High-performance Mo-Si multilayer coatings for extreme-ultraviolet lithography by ion-beam deposition

Eberhard Spiller, Sherry L. Baker, Paul B. Mirkarimi, Victor Sperry, Eric M. Gullikson, and Daniel G. Stearns
Appl. Opt. 42(19) 4049-4058 (2003)

Mo/Si and Mo/Be multilayer thin films on Zerodur substrates for extreme-ultraviolet lithography

Paul B. Mirkarimi, Sasa Bajt, and Mark A. Wall
Appl. Opt. 39(10) 1617-1625 (2000)

Design and performance of capping layers for extreme-ultraviolet multilayer mirrors

Saša Bajt, Henry N. Chapman, Nhan Nguyen, Jennifer Alameda, Jeffrey C. Robinson, Michael Malinowski, Eric Gullikson, Andrew Aquila, Charles Tarrio, and Steven Grantham
Appl. Opt. 42(28) 5750-5758 (2003)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved