Abstract
A new optical monitoring system has been developed that allows recording of transmission spectra in the wavelength range between 400 and of a growing optical coating during deposition. Several kinds of thin film sample have been prepared by use of a hybrid monitoring strategy that is essentially based on a combination of quartz monitoring and in situ transmission spectra measurements. We demonstrate and discuss the applicability of our system for reengineering procedures of high-low stacks and measurements of small vacuum or thermal shifts of optical coatings.
© 2007 Optical Society of America
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