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In situ optical characterization and reengineering of interference coatings

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Abstract

A new optical monitoring system has been developed that allows recording of transmission spectra in the wavelength range between 400 and 920  nm of a growing optical coating during deposition. Several kinds of thin film sample have been prepared by use of a hybrid monitoring strategy that is essentially based on a combination of quartz monitoring and in situ transmission spectra measurements. We demonstrate and discuss the applicability of our system for reengineering procedures of high-low stacks and measurements of small vacuum or thermal shifts of optical coatings.

© 2007 Optical Society of America

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