Abstract

The Laue-type multilayer monochromator (LMM) is a promising optical element with a small size and high efficiency in a synchrotron radiation facility. By the dynamical diffraction theory, using DC magnetron sputtering technology, an LMM with a total thickness of 47 µm and a periodic thickness of 4.7 nm ${{\rm WSi}_2}/{\rm Si}$ multilayer at 26 keV is designed and fabricated. During the preparation, the total number of layers is up to 20000, and every 300th layer of Si is replaced by WSi2 as the marker, so the multilayer is divided into 67 areas. The cross section of the multilayer is measured by a scanning electron microscope (SEM), and the marker region thickness error is 0.28% (RMS). The diffraction test experiment of the LMM is carried out at the Shanghai synchrotron radiation facility (SSRF). The 1st-order peak angle is 5.05 mrad, and the efficiency is 75.0%, which is close to the theoretical calculation result of 5.1 mrad and 79.1%. The Darwin width of the LMM is 0.17 mrad which is equal to the theoretical calculation. Based on the Bragg’s diffraction equation, the energy resolution ($\Delta {E}/{E}$) is 3.3%.

© 2024 Optica Publishing Group

Multilayer Kirkpatrick-Baez focusing mirrors with phase compensation for sub-20 nm focusing at the hard X-ray nanoprobe beamline of SSRF

Hui Jiang, Jianan Xie, Yan He, Zhisen Jiang, Dongxu Liang, Huaina Yu, and Aiguo Li
Opt. Express 32(8) 13597-13613 (2024)

Development of multilayer laminar-type diffraction gratings to achieve high diffraction efficiencies in the 1-8 keV energy region

Masahiko Ishino, Philip A. Heimann, Hiroyuki Sasai, Masatoshi Hatayama, Hisataka Takenaka, Kazuo Sano, Eric M. Gullikson, and Masato Koike
Appl. Opt. 45(26) 6741-6745 (2006)

Design of a monocapillary with an inner Al₂O₃/HfO₂ multilayer to obtain focused monochromatic hard X-rays

Yanli Li, Wensi Lv, Xiangdong Kong, Huibin Zhao, and Li Han
Appl. Opt. 63(11) 2837-2842 (2024)

2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy

Wei Xu, Weihe Xu, Nathalie Bouet, Juan Zhou, Hanfei Yan, Xiaojing Huang, Ajith Pattammattel, Yuan Gao, Ming Lu, Maxim Zalalutdinov, Yong S. Chu, and Evgeny Nazaretski
Opt. Express 28(12) 17660-17671 (2020)

Diffraction properties of multilayer Laue lenses with an aperture of 102 µm and WSi₂/Al bilayers

Adam Kubec, Naresh Kujala, Raymond Conley, Nathalie Bouet, Juan Zhou, Tim M Mooney, Deming Shu, Jeffrey Kirchman, Kurt Goetze, Jörg Maser, and Albert Macrander
Opt. Express 23(21) 27990-27997 (2015)