Abstract

A focusing reflectometer for measuring the optical constants of thin films by the (Rϕ) method is described. The focusing reflectometer has a larger effective aperture than typical planar reflectometers, and, unlike planar reflectometers, the illuminated area of the specimen is independent of the angle of incidence. The intensity of the incident light is not measured so the reflectometer is limited to wavelengths where the reflectivity of the specimen varies rapidly with the angle of incidence. Results are given for evaporated gold films in the energy range 6.0 eV to 12.0 eV.

© 1971 Optical Society of America

Scanning Ultrahigh Vacuum Reflectometer

T. Huen, G. B. Irani, and F. Wooten
Appl. Opt. 10(3) 552-556 (1971)

Method of Using the Reflectance Ratios of Different Angles of Incidence for the Determination of Optical Constants

G. R. Field and E. Murphy
Appl. Opt. 10(6) 1402-1405 (1971)

Method for Determining the Optical Constants of Semitransparent Films

S. E. Webber and S. R. Scharber
Appl. Opt. 10(2) 338-341 (1971)

Reflectometer for Determining Optical Constants

Roy F. Potter
Appl. Opt. 4(1) 53-57 (1965)

Optical Properties of Evaporated Rhodium Films Deposited at Various Substrate Temperatures in the Vacuum Ultraviolet from 150 to 2000 Å*

J. Thomas Cox, G. Hass, and W. R. Hunter
J. Opt. Soc. Am. 61(3) 360-364 (1971)