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Effect of surface roughness on change of the polarization state of light reflected from silicon and germanium

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Abstract

The optical effect of surface roughness on a scale below the wavelength of light can be represented as a transitional layer between the bulk substrate and the vacuum. Using two different models of that layer, we calculated the changes of the ellipsometric parameters. Comparison of the results of this calculation with the actual optical behavior of the silicon–germanium substrate is presented.

© 1976 Optical Society of America

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Equations (10)

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