Abstract

The obsolete Lummer-Gehrcke interferometer is reexamined, and it is shown how, with a few simple modifications, this instrument can be used to study the optical properties of thin, solid, dielectric films. In particular, the thickness, the wavelength dispersion, and the absorption spectrum of the film can all be obtained simultaneously. In the case of anisotropic films, the polarization dependence of these parameters is obtained very conveniently. The modified interferometer allows continuous monitoring of the above parameters in situ during growth.

© 1976 Optical Society of America

Asymmetrical fringe broadening in a Lummer-Gehrcke interferometer

V. P. Nayyar and N. K. Verma
Appl. Opt. 15(4) 1037-1039 (1976)

Phase function and intensity distribution of a Lummer-Gehrcke multiinterferometer

Eusebio Bernabeu and Luis L. Sanchez-Soto
Appl. Opt. 25(18) 3163-3166 (1986)

Measurements with a Lummer Gehrcke Plate

John K. Robertson
J. Opt. Soc. Am. 11(5) 559-563 (1925)

Autocollimation-type ellipsometer for monitoring film growth through a single window

T. Yamaguchi and H. Takahashi
Appl. Opt. 15(3) 677-680 (1976)

Optical parameters of partially transmitting thin films. 2: Experiment and further analysis of a novel method for their determination

J. Shamir
Appl. Opt. 15(1) 120-126 (1976)