Abstract

This paper presents a theoretical study of the effects of partial coherence (via the effect of condenser aperture) on the resolution of two pinholes by a semitransparent and π-phase annular aperture microscope. The illumination used is nonuniform and nonsymmetric. The response of the resolution has been studied in three discrete planes of illumination. It has been seen that by making the central region of the π-phase annular aperture completely transparent, best resolution is obtained in the plane of illumination ϕ = π/2. The oscillatory behavior of the limiting resolution has also been displayed graphically.

© 1977 Optical Society of America

Resolution of a microscope: improvement using a centrally obstructed condenser aperture and a semitransparent Π-phase annular aperture objective system

V. P. Nayyar and N. K. Verma
Appl. Opt. 15(5) 1341-1344 (1976)

Linewidth measurement with an optical microscope: the effect of operating conditions on the image profile

D. Nyyssonen
Appl. Opt. 16(8) 2223-2230 (1977)

Annular apertures for angular tracking

Marek Elbaum and Michael Greenebaum
Appl. Opt. 16(9) 2438-2440 (1977)

Two-point resolution of Gaussian aperture operating in partially coherent light using various resolution criteria

V. P. Nayyar and N. K. Verma
Appl. Opt. 17(14) 2176-2180 (1978)

Influence of Partially Coherent Illumination on the Performance of Non-Airy Pupil Functions in Microscopic Systems

S. C. Som
Appl. Opt. 11(3) 655-661 (1972)