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Comprehensive analysis of gratings for ultraviolet space instrumentation

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Abstract

Comprehensive measurements in the vacuum uv range of 1200–3000 Å of efficiency, polarization, and scattering of classically ruled and photoresist gratings are reported. The results show that the art of ruling gratings for vacuum uv use has reached a high level of sophistication and that careful analysis of grating properties can lead to useful improvement of the ruling art.

© 1978 Optical Society of America

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