Abstract
A method of measuring the shape of high numerical aperture (NA <0.95), convex or concave, aspheric surfaces is described. The aspheric slope may be as large as 1200 waves/rad. The method is applied in two steps. First, a standard measurement is performed to obtain a reference surface. Second, the reproducibility of the fabrication of aspheric surfaces is tested by means of a holographic comparison method. The measuring error is smaller than 0.1 μm.
© 1978 Optical Society of America
Full Article | PDF ArticleMore Like This
Amiya Biswas and Jeremy Coupland
Appl. Opt. 47(11) 1705-1710 (2008)
Lei Zhang, Chao Tian, Dong Liu, Tu Shi, Yongying Yang, Hanshuo Wu, and Yibing Shen
Appl. Opt. 53(25) 5755-5762 (2014)
Ziliang Yan, Dahai Li, Xinwei Zhang, and Renhao Ge
Appl. Opt. 63(6) 1583-1589 (2024)