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Mapping of optical surfaces with quarter wavelength fringes

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Abstract

A contactless interference surface testing method is described that is capable of creating fringe patterns with fringe separations corresponding to a surface deformation of a quarter-wavelength of the illumination light. Contrary to common Fizeau fringes where the interference pattern occurs by superposing two wavefronts, the described method is based upon a superposition of four wavefronts. These wavefronts are created by a diffraction transmission grating which is contactlessly placed over the surface to be tested. Basically, this technique provides a beat frequency pattern with adaptable fringe separation. Practical applications of this method to semiconductor silicon wafers are presented.

© 1978 Optical Society of America

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Corrections

G. Makosch and W. Jaerisch, "Mapping of optical surfaces with quarter wavelength fringes: erratum," Appl. Opt. 17, 1990-1990 (1978)
https://opg.optica.org/ao/abstract.cfm?uri=ao-17-13-1990

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