Abstract
A contactless interference surface testing method is described that is capable of creating fringe patterns with fringe separations corresponding to a surface deformation of a quarter-wavelength of the illumination light. Contrary to common Fizeau fringes where the interference pattern occurs by superposing two wavefronts, the described method is based upon a superposition of four wavefronts. These wavefronts are created by a diffraction transmission grating which is contactlessly placed over the surface to be tested. Basically, this technique provides a beat frequency pattern with adaptable fringe separation. Practical applications of this method to semiconductor silicon wafers are presented.
© 1978 Optical Society of America
Full Article | PDF ArticleCorrections
G. Makosch and W. Jaerisch, "Mapping of optical surfaces with quarter wavelength fringes: erratum," Appl. Opt. 17, 1990-1990 (1978)https://opg.optica.org/ao/abstract.cfm?uri=ao-17-13-1990
More Like This
W. Jaerisch and G. Makosch
Appl. Opt. 17(5) 740-743 (1978)
G. Makosch and W. Jaerisch
Appl. Opt. 17(13) 1990-1990 (1978)
W. Jaerisch and G. Makosch
Appl. Opt. 12(7) 1552-1557 (1973)