Table I
Simulation of the Production by Turning Value Monitoring of the Seven-Layer Beam Splitter shown in Fig. 1
Layer number | 1 | 2 | 3 | 4 | 5 | 6 | 7 |
---|
Control wavelength (nm) | 497.3 | 449.2 | 456.0 | 431.2 | 742.9 | 427.2 | 427.8 |
Maximum or minimum | max | mm | max | mm | nun | max | mm |
T initial | 0.960 | 0.884 | 0.889 | 0.826 | 0.643 | 0.772 | 0.939 |
Intermediate extremum of T | 0.659 | 0.982 | 0.744 | 0.960 | none | none | none |
T final | 0.957 | 0.867 | 0.891 | 0.820 | 0.219 | 0.935 | 0.323 |
Table II
Simulated Production Runs of the Beam Splitter of Fig. 1 Using Turning Value Monitoring with Random Errors of 0.005 In Determing the Turning Values
Simulation n0 | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 |
---|
| 0.274 | 0.389 | 0.413 | 0.427 | 0.340 | 0.341 | 0.568 | 0.352 | 0.345 |
| 0.072 | 0.107 | 0.074 | 0.065 | 0.086 | 0.104 | 0.163 | 0.098 | 0.043 |
|ΔTs|m | 0.210 | 0.210 | 0.466 | 0.393 | 0.198 | 0.245 | 0.342 | 0.223 | 0.157 |
Note: The transmittance of the simulated filters is given in
Fig. 4. The performance of the perfect filter is: Mean transmittance
, mean deviation
, and the maximum deviation |Δ
Ts|
m = 0.094.
Table III
Simulated Production Runs of the Beam Splitter of Fig. 1 Using Turning Value Monitoring with Random Errors of 0.003 in Determining the Turning Values
Simulation n0 | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 |
---|
| 0.281 | 0.368 | 0.382 | 0.404 | 0.334 | 0.334 | 0.494 | 0.346 | 0.324 |
| 0.068 | 0.068 | 0.094 | 0.058 | 0.090 | 0.075 | 0.149 | 0.083 | 0.043 |
|ΔTs|m | 0.191 | 0.448 | 0.191 | 0.382 | 0.211 | 0.185 | 0.268 | 0.207 | 0.125 |
Table IV
Simulated Production Runs of the Beam Splitter of Fig. 1 Using Turning Value Monitoring with Random Errors of 0.001 in Determining the Turning Values
Simulation n0 | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 |
---|
| 0.298 | 0.371 | 0.352 | 0.375 | 0.330 | 0.331 | 0.420 | 0.339 | 0.318 |
| 0.059 | 0.066 | 0.056 | 0.050 | 0.063 | 0.071 | 0.086 | 0.067 | 0.047 |
|ΔTs|m | 0.156 | 0.154 | 0.367 | 0.286 | 0.154 | 0.165 | 0.178 | 0.171 | 0.110 |
Note: The transmittance of the simulated filters is given in
Fig. 5.
Table V
Simulated Production Runs of the Beam Splitter of Fig. 1 Using Turning Value Monitoring with Random Errors of 0.001 as in Table IV and a Simultaneous Systematic Overshoot of 0.001
Simulation n0 | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 |
---|
| 0.353 | 0.402 | 0.420 | 0.410 | 0.340 | 0.375 | 0.450 | 0.352 | 0.337 |
| 0.049 | 0.090 | 0.076 | 0.069 | 0.059 | 0.054 | 0.105 | 0.059 | 0.047 |
|ΔTs|m | 0.358 | 0.258 | 0.453 | 0.398 | 0.223 | 0.415 | 0.339 | 0.331 | 0.182 |
Table VI
Error (in nm) In the Thickness of the ith Layer of the Beam Splitter which Occurs when the Transmittance at Termination of Deposition Overshoots the Correct Value of the Spectral Profile over 400–800 nm by δTi)
Layer i δTi | 1 | 2 | 3 | 4 | 5 | 6 | 7 |
---|
0.015 | 1.5 | 4.7 | 1.5 | 6.5 | 1.0 | 4.0 | 1.5 |
0.010 | 1.0 | 3.2 | 1.0 | 4.5 | 0.5 | 3.0 | 1.0 |
0.005 | 0.5 | 1.5 | 0.5 | 2.5 | 0.2 | 1.5 | 0.5 |
Note: The thicknesses of the layers of the perfect filter are 103.4, 194.9, 89.2, 154.7, 67.7, 80.1, 42.9 nm.
Table VII
Effect of 0.015 Standard Deviation Transmittance Error on the Performance of the Seven-Layer Beam Splitter Using Wideband Monitoring (400–800 nm)
Simulation n0 | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 |
---|
| 0.356 | 0.339 | 0.335 | 0.345 | 0.362 | 0.344 | 0.354 | 0.349 | 0.337 |
| 0.061 | 0.052 | 0.046 | 0.052 | 0.049 | 0.047 | 0.046 | 0.047 | 0.050 |
|ΔT|m | 0.190 | 0.116 | 0.141 | 0.165 | 0.129 | 0.108 | 0.118 | 0.100 | 0.118 |
Note: The plots of the simulated filters are given in
Fig. 7.
Table VIII
Effect of 0.010 Standard Deviation Transmittance Error on the Performance of the Seven-Layer Beam Splitter Using Wideband Monitoring (400–800 nm)
Simulation n0 | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 |
---|
| 0.356 | 0.343 | 0.337 | 0.343 | 0.355 | 0.355 | 0.343 | 0.346 | 0.340 |
| 0.056 | 0.051 | 0.045 | 0.049 | 0.046 | 0.047 | 0.045 | 0.047 | 0.048 |
|ΔT|m | 0.168 | 0.108 | 0.107 | 0.121 | 0.116 | 0.119 | 0.108 | 0.095 | 0.108 |
Note: The plots of the simulated filters are given in
Fig. 8.
Table IX
Effect of 0.005 Standard Deviation Transmittance Error on the Performance of the Seven-Layer Beam Splitter Using Wideband Monitoring (400–800 nm)
Simulation n0 | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 |
---|
| 0.349 | 0.345 | 0.342 | 0.349 | 0.354 | 0.354 | 0.341 | 0.348 | 0.341 |
| 0.050 | 0.049 | 0.046 | 0.051 | 0.048 | 0.049 | 0.044 | 0.047 | 0.047 |
|ΔT|m | 0.132 | 0.097 | 0.099 | 0.118 | 0.116 | 0.122 | 0.101 | 0.094 | 0.094 |
Note: The plots of the simulated filters are given in
Fig. 9.