Abstract

Ellipsometric measurements at 10.6 μm using a modulated light ellipsometer and ellipsometer and reflectometer measurements at 0.6328 μm are reported for the refractive indices of As₂S₃, As₂Se₃, and ZnS films deposited on KCl substrates. The observation of strain-induced anisotropy is reported, and an analysis of the effects of anisotropy in thin film ellipsometry is presented.

© 1979 Optical Society of America

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