Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Assessment of surface roughness by x-ray scattering and differential interference contrast microscopy

Not Accessible

Your library or personal account may give you access

Abstract

X-ray scattering measurements at 8.3 Å and 13.3 Å are employed to study surface roughness down to 2.5-Å rms. The x-ray setup is described, and its sensitivity is discussed. The scattering data are analyzed by electromagnetic scattering theory to give information about the surface roughness. Micrographs of the same surfaces are made by differential interference contrast microscopy. A good correlation between these micrographs and the results from the x-ray scattering measurements is established, which indicates that differential interference contrast microscopy is a very useful tool for the evaluation of highly polished surfaces.

© 1979 Optical Society of America

Full Article  |  PDF Article
More Like This
Effect of surface roughness and subsurface damage on grazing-incidence x-ray scattering and specular reflectance

Gyanendra S. Lodha, Koujun Yamashita, Hideyo Kunieda, Yuzuru Tawara, Jin Yu, Yoshiharu Namba, and Jean M. Bennett
Appl. Opt. 37(22) 5239-5252 (1998)

Extreme UV and x-ray scattering measurements from a rough LiF crystal surface characterized by electron micrography

Najib Alehyane, Mohammed Arbaoui, Robert Barchewitz, Jean-Michel André, Finn E. Christensen, Allan Hornstrup, Jacqueline Palmari, Monique Rasigni, Réné Rivoira, and Georges Rasigni
Appl. Opt. 28(10) 1763-1772 (1989)

Comparative study of the roughness of optical surfaces and thin films by use of x-ray scattering and atomic force microscopy

Victor E. Asadchikov, Angela Duparré, Stefan Jakobs, Albert Yu. Karabekov, Igor V. Kozhevnikov, and Yury S. Krivonosov
Appl. Opt. 38(4) 684-691 (1999)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (13)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved