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Scattering from high efficiency diffraction gratings

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Abstract

This paper has characterized and measured scatter from high efficiency and reflective diffraction gratings. Three major types of scatter are identified: (1) random, which occurs over 2π sr; (2) band or ghost scatter, which occurs in the plane of incidence; and (3) structured scatter, which is a symmetrical pattern repeated about each order. Measurements were taken at 10.6 μm on gratings made by ruling, ion etching, holography, or a combination of these techniques. We found that the characteristic scatter from these high efficiency gratings depends strongly on the way the gratings are fabricated.

© 1980 Optical Society of America

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