Abstract

This paper has characterized and measured scatter from high efficiency and reflective diffraction gratings. Three major types of scatter are identified: (1) random, which occurs over 2π sr; (2) band or ghost scatter, which occurs in the plane of incidence; and (3) structured scatter, which is a symmetrical pattern repeated about each order. Measurements were taken at 10.6 μm on gratings made by ruling, ion etching, holography, or a combination of these techniques. We found that the characteristic scatter from these high efficiency gratings depends strongly on the way the gratings are fabricated.

© 1980 Optical Society of America

Rectangular-profile diffraction grating from single-crystal silicon

Michel Josse and Don L. Kendall
Appl. Opt. 19(1) 72-76 (1980)

High-efficiency metallic diffraction gratings for laser applications

R. D. Boyd, J. A. Britten, D. E. Decker, B. W. Shore, B. C. Stuart, M. D. Perry, and Lifeng Li
Appl. Opt. 34(10) 1697-1706 (1995)

Analysis of the changes in efficiency across the ruled area of a concave diffraction grating

M. Neviere and W. R. Hunter
Appl. Opt. 19(12) 2059-2065 (1980)

Reflectivity changes of Ge and the efficiency of moving diffraction gratings

T. A. Wiggins
Appl. Opt. 19(4) 521-524 (1980)

High-efficiency dielectric reflection gratings: design, fabrication, and analysis

Karl Hehl, Joerg Bischoff, Ullrich Mohaupt, Martin Palme, Bernd Schnabel, Lutz Wenke, Ragnar Bödefeld, Wolfgang Theobald, Eberhard Welsch, Roland Sauerbrey, and Hartmut Heyer
Appl. Opt. 38(30) 6257-6271 (1999)