Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Asymmetric triangular grating profiles with 90° groove angles produced by ion-beam erosion

Not Accessible

Your library or personal account may give you access

Abstract

A simple phenomenological model has been developed to account for the effects of redeposition during transverse ion-beam erosion of grating relief patterns on surfaces. The model predicts the evolution with time of an inclined facet in the substrate, and the dependence of the facet angle θr on angle of incidence of the ion beam, erosion rates of mask and substrate, and the geometrical parameters of the mask. The results are illustrated by calculation of the angular dependence of θr for AZ-1350 photoresist masks on GaAs and SiO2 substrates and for Ti on SiO2. A strong dependence of θr on mask intercept angle a is found, except for a limited range in angle of incidence of the ion beam. Combined with results derived previously, the facet angles θs and θr and the groove angle θg of the asymmetric triangular groove profiles produced in these systems have been determined. A groove angle of 90° cannot be obtained for AZ-1350 on GaAs and SiO2, but in appropriate conditions a 90° groove angle may be obtained in SiO2 with a Ti mask.

© 1981 Optical Society of America

Full Article  |  PDF Article
More Like This
Evolution of grating profiles under ion-beam erosion

L. F. Johnson
Appl. Opt. 18(15) 2559-2574 (1979)

Generation of periodic surface corrugations

L. F. Johnson, G. W. Kammlott, and K. A. Ingersoll
Appl. Opt. 17(8) 1165-1181 (1978)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (26)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (22)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved