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Height and slope distributions for surfaces of rough metallic deposits

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Abstract

This paper deals with the accurate determination of height and slope distributions for surfaces of rough metallic deposits (magnesium, copper, silver, and gold). These distributions are computed using a microdensitometer analysis of electron micrographs of surface replicas. It is shown that most of the surfaces examined have reasonable Gaussian height and slope distributions. Apart from magnesium surfaces, the rms roughnesses determined from these distributions agree (within the accuracy range of their measurements) with rms roughnesses deduced from the autocovariance functions computed previously. Within the framework of scalar scattering theory, some emphasis is laid on the value of slopes to draw certain conclusions about the validity of the assumptions under which the scalar scattering theory is derived.

© 1982 Optical Society of America

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