Abstract
A new technique has been developed that employs highly focused laser beams for both generating and detecting thermal waves in the megahertz frequency regime. This technique includes a comprehensive 3-D depth-profiling theoretical model; it has been used to measure the thickness of both transparent and opaque thin films with high spatial resolution. Thickness sensitivities of ±2% over the 500–25,000-Å range have been obtained for Al and SiO2 films on Si substrates.
© 1983 Optical Society of America
Full Article | PDF ArticleMore Like This
L. C. M. Miranda
Appl. Opt. 22(18) 2882-2886 (1983)
Dorota Korte and Mladen Franko
J. Opt. Soc. Am. A 32(1) 61-74 (2015)
Tie-Nan Ding and Elsa Garmire
Appl. Opt. 22(20) 3177-3181 (1983)