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Oblique incidence interferometry of rough surfaces using a novel Dove-prism spectrometer

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Abstract

An oblique incidence interferometric method of measuring the surface texture of engineering materials is reported. It utilizes a dove prism as beam splitter and reference surface. Mathematical modeling of the interference pattern is undertaken, and the model experimentally evaluated. This model is then used to measure the surface texture of sample surfaces. Comparison with results from a stylus instrument show both instruments to be compatible. Attempts to use fringe visibility to measure surface texture are reported, but further modeling will be required before this method could be of practical use.

© 1984 Optical Society of America

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