Abstract

A magnification-type x-ray imaging system, that is, an x-ray microscope, is evaluated by taking into account the partial coherency of the illumination of the objects. The transfer characteristic proposed in an earlier paper [ J. Opt. Soc. Am. A 1, 11 ( 1984)] is used for the evaluation, and based on the results, an optimum design for a high-resolution x-ray imaging system is discussed. The image restoration method for this system is also shown.

© 1984 Optical Society of America

X-ray lithography system: analysis and an optimum construction

Yoshiki Yamakoshi, Nobufumi Atoda, Keizo Shimizu, Takuso Sato, and Yukiharu Shimizu
Appl. Opt. 25(6) 922-927 (1986)

Linear restoration of projections obtained by an extended incoherent source

Yoshiki Yamakoshi and Takuso Sato
Appl. Opt. 23(14) 2271-2274 (1984)

Selection of the optimum wavelength for an x-ray tomography system

Yoshiki Yamakoshi and Takuso Sato
Appl. Opt. 23(6) 896-900 (1984)

Transfer characteristic for a projection-type imaging system with an extended incoherent source

Yoshiki Yamakoshi and Takuso Sato
J. Opt. Soc. Am. A 1(1) 11-17 (1984)

Advanced laser-backlit grazing-incidence x-ray imaging systems for inertial confinement fusion research. I. Design

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