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Soft x-ray lithography using radiation from laser-produced plasmas

P. Gohil, H. Kapoor, D. Ma, M. C. Pekerar, T. J. Mcllrath, and M. L. Ginter

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Abstract

Plasmas formed by focusing 0.6-J pulses from a 10-Hz Nd:YAG laser onto solid targets were used as soft x-ray sources for lithographic studies. Results of exposing masked photoresists to plasma radiation produced using steel, copper, and tungsten as targets are presented.

© 1985 Optical Society of America

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