Abstract

A cyclic interferometer can be used for both lateral and radial shearing. Being common-path this interferometer is quite stable. The use of a cyclic shear interferometer for phase shifting interferometry is discussed. The phase shifting is provided here by polarization techniques. Some useful cyclic phase shifting interferometer arrangements are discussed, and the working of a polarization phase shifting cyclic shear interferometer is demonstrated.

© 1985 Optical Society of America

Phase shifter calibration in phase-shifting interferometry

Yeou-Yen Cheng and James C. Wyant
Appl. Opt. 24(18) 3049-3052 (1985)

Measurement of the surface profile of an axicon lens with a polarization phase-shifting shearing interferometer

Sanjib Chatterjee and Y. Pavan Kumar
Appl. Opt. 50(32) 6057-6062 (2011)

Thickness measurement of transparent glass plates using a lateral shearing cyclic path optical configuration setup and polarization phase shifting interferometry

Y. Pavan Kumar and Sanjib Chatterjee
Appl. Opt. 49(33) 6552-6557 (2010)

Phase-shifting lateral shearing interferometry using wedge-plate and interferometric grating

Reena Disawal, Jitendra Dhanotia, and Shashi Prakash
Appl. Opt. 53(31) 7534-7539 (2014)

New common-path phase shifting interferometer using a polarization technique

Hiroshi Kadono, Nobukatsu Takai, and Toshimitsu Asakura
Appl. Opt. 26(5) 898-904 (1987)