Abstract
We describe a computational method of determining the optical constants n(λ),k(λ) and the film thickness d from photometric R(λ),T(λ) and ellipsometric Ψ(λ),Δ(λ) data. Combinations of three or four of the measured quantities are compared using Newton-Raphson and Simplex techniques. The method is applied to thin films of gold and amorphous metallic alloys. The results are discussed.
© 1986 Optical Society of America
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