Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

X-ray lithography system: analysis and an optimum construction

Not Accessible

Your library or personal account may give you access

Abstract

An x-ray lithography system is analyzed by taking account of the partial coherence of the x-ray wave. The transfer characteristic proposed in an earlier paper [ J. Opt. Soc. Am. A 1, 11 ( 1984)] is used in the evaluation. First, the simulated replication patterns obtained by using the method are compared with some experimental results. Then an optimum construction for an x-ray lithography system is discussed. It is concluded that, if the optimum ratio between the lateral spread of the x-ray source and the distance between the source and the mask is chosen, high-resolution patterns can be produced with minimum exposure time.

© 1986 Optical Society of America

Full Article  |  PDF Article
More Like This
High-resolution x-ray lithography using a phase mask

Yoshiki Yamakoshi, Nobufumi Atoda, Keizo Shimizu, Takuso Sato, and Yukiharu Shimizu
Appl. Opt. 25(6) 928-932 (1986)

Magnification-type x-ray imaging system: optimum design and image restoration

Yoshiki Yamakoshi, Koichi Kitamura, and Takuso Sato
Appl. Opt. 23(23) 4292-4298 (1984)

Selection of the optimum wavelength for an x-ray tomography system

Yoshiki Yamakoshi and Takuso Sato
Appl. Opt. 23(6) 896-900 (1984)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (19)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved