Abstract

Diffraction efficiencies of a blazed grating measured in the soft x-ray region with photon energies between 60 and 925 eV are compared with calculations using the differential formalism of the exact electromagnetic theory. The parameters of the grating (gold coated with 1200 lines/mm and blaze angle 1.5°) are frequently used in soft x-ray monochromators. A quality check of this grating is made by investigating the total efficiency. Data for the −1, 0, +1, +2, and +3 orders are presented, so that the suppression capability for higher harmonics can be derived. Use of a blazed grating diffracting in 0. order is given.

© 1987 Optical Society of America

Efficiency of a grazing-incidence off-plane grating in the soft-x-ray region

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Refraction effects in soft x-ray multilayer blazed gratings

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Leonid I. Goray and John F. Seely
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