Abstract

If the nonlinearity of the motion of a piezoelectric transducer (PZT) can be described as a quadratic function, the integrated intensity of one frame in phase shift interferometry can be calculated using the Fresnel integral. For a PZT with smaller nonlinearity, the rms phase error is almost linearly proportional to the quadratic coefficient. The effects of PZT nonlinearity on the three- and the four-bucket algorithms are compared.

© 1987 Optical Society of America

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