Abstract

Two-wave mixing at a holographic grating being recorded in a positive photoresist film is used for simultaneously and independently stabilizing the holographic setup itself and for measuring the real-time optical modulation evolution during recording. The method is more sensitive than directly measuring the diffraction efficiency with a probe beam, being particularly interesting for very low efficiency values. This technique is used here for studying the photoreaction kinetics in a Shipley AZ-1350J positive photoresist, and measurements agree with those made with a well-established spectrophotometric method.

© 1988 Optical Society of America

Photoresist resolution measurement during the exposure process

M. S. Sthel, Carlos R. A. Lima, and Lucila Cescato
Appl. Opt. 30(35) 5152-5156 (1991)

Holographic technique for measurement of the kinetic constant and optical modulation of photosensitive materials

L. F. Avila, A. A. Freschi, and Lucila Cescato
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Characteristics of Relief Phase Holograms Recorded in Photoresists

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Analysis of an active stabilization system for a holographic setup

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Fourier synthesis for fabricating blazed gratings using real-time recording effects in a positive photoresist

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