Life on the edge: measuring linewidths

Michael Baum

doi:10.1364/AO.27.003714

LOGIN OR CREATE ACCOUNT
PRISM SUBMISSION

This website uses cookies to deliver some of our products and services as well as for analytics and to provide you a more personalized experience. Click here to learn more. By continuing to use this site, you agree to our use of cookies. We've also updated our Privacy Notice. Click here to see what's new.

Allow All Cookies

SEARCH OPTIONS

KEYWORDS

Only if other resources available (images, video, datasets)

Title and Abstract

All text

AUTHORS

• Use these formats for best results: Smith or J Smith
• Use a comma to separate multiple people: J Smith, RL Jones, Macarthur

Any : All :

Tips for preparing a search:

Keep it simple - don't use too many different parameters.
Separate search groups with parentheses and Booleans. Note the Boolean sign must be in upper-case.
- Example: (diode OR solid-state) AND laser [search contains "diode" or "solid-state" and laser]
- Example: (photons AND downconversion) - pump [search contains both "photons" and "downconversion" but not "pump"]
Improve efficiency in your search by using wildcards.

Asterisk ( * ) -- Example: "elect*" retrieves documents containing "electron," "electronic," and "electricity"
Question mark (?) -- Example: "gr?y" retrieves documents containing "grey" or "gray"

Use quotation marks " " around specific phrases where you want the entire phrase only.
For best results, use the separate Authors field to search for author names.
Author name searching:
- Use these formats for best results: Smith or J Smith
- Use a comma to separate multiple people: J Smith, RL Jones, Macarthur
- Note: Author names will be searched in the keywords field, also, but that may find papers where the person is mentioned, rather than papers they authored.

SEARCH IN

Journals

Vol.

Issue

Page

Conferences

Year

Paper #

Industry Reports

Report Year

PUBLICATION YEARS

From To

Enter only one date to search

After ("From") or Before ("To")

OPTICS & PHOTONICS TOPICS

Browse All Topics

Selected topics

Find articles with any selected topics Find articles with all selected topics

Browse All Topics
Click the to reveal subtopics. Use the checkbox to select a topic to filter your search.

About Optics & Photonics Topics
Optica Publishing Group developed the Optics and Photonics Topics to help organize its diverse content more accurately by topic area. This topic browser contains over 2400 terms and is organized in a three-level hierarchy. Read more.

Topics can be refined further in the search results. The Topic facet will reveal the high-level topics associated with the articles returned in the search results.

SPECIAL COLLECTIONS

Energy and Environmental Optics Express
Engineering and Laboratory Notes
Memoranda
Opinions

Reviews
Spotlight on Optics
Tutorials

Clear my choices above

Journals Journals
Conferences
- Find Conferences
- By Year
- By Name
- Featured
- Optical Fiber Communication (OFC)
- Conference on Lasers and Electro-Optics (CLEO)
- Frontiers in Optics (FiO)
Other Resources
- Information For
- Authors
- Reviewers
- Librarians
- Products and Services
- Digital Archive
- Interactive Science Publishing (ISP)
- Optics ImageBank
- Optics and Photonics Topics
- Spotlight on Optics
- Publications
- Bookshelf
- Industry Reports
- Special Collections
- Regional Content
- On The Cover: Photonics Research
- Spotlight: Chinese Optics Letters
- Open Access Information
- Open Access Statement and Policy
- Terms for Journal Article Reuse

My Favorites
- Go to My Account
- Login to access favorites
Recent Pages

Journal Home About Issues in Progress Current Issue All Issues Early Posting Feature Issues

Applied Optics
Vol. 27,
Issue 17,
pp. 3714, 3722, 3760
(1988)
•https://doi.org/10.1364/AO.27.003714

Life on the edge: measuring linewidths

Michael Baum

Author Information

Author Affiliations

Michael Baum

Find other works by these authors

M Baum

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
Michael Baum, "Life on the edge: measuring linewidths," Appl. Opt. 27, 3714-3760 (1988)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Related Topics
Optics & Photonics Topics
?

The topics in this list come from the Optics and Photonics Topics applied to this article.

Abstract
Full Article

Cited By
Metrics
Back to Top

Abstract

How to measure the width of lines on a semiconductor photomask is a classic example of how NBS responds to industrial needs. The problem came to the attention of NBS researchers when a commercial standards maker sought measurements to check his linewidth standards against NBS standards.

Full Article | PDF Article

Previous Article Next Article

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription