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Optical constant determination of thin films

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Abstract

A method for the determination of the complex index of thin films is described based on the reflectance of the film in the presence and absence of a transparent overcoat film. It is shown that by proper choice of overcoat film, the real and imaginary components (n and k) of the index can be separated so that a simple graphical representation is achieved for unique determination of n and k.

© 1988 Optical Society of America

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