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Derivation of surface macroroughness parameters of a random rough surface from an optical interferometric measurement

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Abstract

A new technique for the measurement of surface roughness based on the intensity fluctuations of laser light backscattered from a moving surface has been introduced. Using a statistical model describing surface macroroughness, the possibility of inversion of optically measured data to geometrical surface profile parameters is investigated.

© 1988 Optical Society of America

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