Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Optical scattering from oxidized metals. 2: Model verification for oxidized copper

Not Accessible

Your library or personal account may give you access

Abstract

A model for the calculation of diffuse reflectance spectra for oxidized metals is applied to thermally oxidized copper films and compared with experiments. The model calculations reproduce the spectral structure observed in the experiments. It is demonstrated that the air–oxide interface roughness dominates the scattering for wavelengths shorter than the absorption threshold of the oxide, and the oxide–metal interface roughness dominates for longer wavelengths. Using the model for fitting calculations the rms roughness values for the two interfaces are determined independently. The roughness values agree with the results from high accuracy stylus profiling of the oxide front surface as well as stylus profiling and total integrated scattering of He–Ne light from the bare metal surface, obtained after etching away the oxide. The good overall agreement between the calculated and experimental diffuse reflectance spectra, as well as the rms roughness values determined with different techniques, confirms the applicability of the model.

© 1989 Optical Society of America

Full Article  |  PDF Article
More Like This
Optical scattering from oxidized metals. 1: Model formulation and properties

Arne Roos, Mikael Bergkvist, and Carl-Gustaf Ribbing
Appl. Opt. 28(7) 1360-1364 (1989)

Determination of the SiO2/Si interface roughness by diffuse reflectance measurements

A. Roos, M. Bergkvist, and C. G. Ribbing
Appl. Opt. 27(22) 4660-4663 (1988)

Determination of the SiO2/Si interface roughness by diffuse reflectance measurements

A. Roos, M. Bergkvist, and C. G. Ribbing
Appl. Opt. 27(20) 4314-4317 (1988)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved