Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Patterned infrared spectral filter directly deposited onto cooled substrates

Not Accessible

Your library or personal account may give you access

Abstract

A method for depositing patterned infrared thin film spectral filters directly onto substrates at low temperatures (20°C) is described. Energetic deposition methods (ion-assisted and laser-assisted) were used to avoid heating the substrates, while a multilayer photoresist lift-off technique was applied to pattern the structures. The process produced durable films capable of surviving harsh processing conditions. This is a promising method for depositing patterned coatings directly onto infrared focal plane detector arrays.

© 1989 Optical Society of America

Full Article  |  PDF Article
More Like This
Two-color imaging by the use of patterned optical filters bonded to focal-plane-array detectors

N. S. Gluck, R. B. Bailey, R. de la Rosa, and R. L. Hall
Appl. Opt. 35(28) 5520-5523 (1996)

Effects of low substrate temperature and ion assisted deposition on composition, optical properties, and stress of ZnS thin films

Judith A. Ruffner, Marc D. Himel, Victor Mizrahi, George I. Stegeman, and Ursula J. Gibson
Appl. Opt. 28(24) 5209-5214 (1989)

Transparent conductive indium oxide film deposited on low temperature substrates by activated reactive evaporation

O. Marcovitch, Z. Klein, and I. Lubezky
Appl. Opt. 28(14) 2792-2795 (1989)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved