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Effects of low substrate temperature and ion assisted deposition on composition, optical properties, and stress of ZnS thin films

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Abstract

ZnS thin films were deposited with and without ion assisted deposition onto substrates held at temperatures ranging from −120 to 50°C. Effects on chemical and crystalline composition, film microstructure, refractive index, stress, and waveguide losses were investigated. We observed that minimum stress and minimum losses occurred at the same deposition temperature (−50°C) in ZnS films, which also corresponded to a quenching of crystallinity.

© 1989 Optical Society of America

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