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Automatic calibration method for phase shift shadow moire interferometry

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Abstract

A new calibration procedure for phase shift moire interferometry is proposed. The method does not ask for a high precision machined calibration object and makes use only of the moire setup itself. The procedure is fast and fully automatic. The fringe plane distance λ was determined with a precision of 1.3%. We present control measurements on a plane surface and a perfect sphere confirming the value and the precision of λ.

© 1990 Optical Society of America

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