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Near normal incidence spectroscopy of a Penning ionization discharge in the 110–180 Å range with flat multilayer mirrors

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Abstract

Al iii to Al v spectra emitted from a Penning ionization discharge have been recorded in the 110–180 Å range using two flat multilayer mirrors (Mo/Si and Mo/B4C) as dispersive elements in a near normal incidence configuration.

© 1990 Optical Society of America

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